Multi frequency matching for voltage waveform tailoring
نویسندگان
چکیده
منابع مشابه
Control of electron heating and ion energy distributions in capac - itive plasmas by voltage waveform tailoring based on a novel power sup - ply and impedance matching
Submitted for the GEC15 Meeting of The American Physical Society Control of electron heating and ion energy distributions in capacitive plasmas by voltage waveform tailoring based on a novel power supply and impedance matching BIRK BERGER, JAMES FRANEK, STEVEN BRANDT, West Virginia University, MARTIN LIESE, MATTHIAS BARTHEL, Barthel HF, EDMUND SCHUENGEL, MARK KOEPKE, JULIAN SCHULZE, West Virgin...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2018
ISSN: 1361-6595
DOI: 10.1088/1361-6595/aad2cd